Inventor
YUN HUICHAN
KR5 patents
Patents
5 patentsUS10106687B2Oct 23, 2018
Composition for forming silica layer, method for manufacturing silica layer and silica layer
SAMSUNG SDI CO LTD1 citations47
US9721785B2Aug 1, 2017
Method for manufacturing silica layer, silica layer, and electronic device
SAMSUNG SDI CO LTD0 citations46
US10017646B2Jul 10, 2018
Composition for forming silica layer, method for manufacturing silica layer, and electric device including silica layer
SAMSUNG SDI CO LTD0 citations45
US11518909B2Dec 6, 2022
Composition for forming silica layer, manufacturing method for silica layer, and silica layer
SAMSUNG SDI CO LTD0 citations44
US10153171B2Dec 11, 2018
Method of forming patterns, patterns formed according to the method, and semiconductor device including the patterns
SAMSUNG SDI CO LTD0 citations37