Inventor
BEN DOV GUY
IL4 patents
⚠️ This page may combine multiple inventors who share the name “BEN DOV GUY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS9739702B2Aug 22, 2017
Symmetric target design in scatterometry overlay metrology
KLA TENCOR CORP31 citations92
US10591406B2Mar 17, 2020
Symmetric target design in scatterometry overlay metrology
KLA TENCOR CORP6 citations82
US9909982B2Mar 6, 2018
Pupil plane calibration for scatterometry overlay measurement
KLA TENCOR CORP1 citations47