Inventor

NAJAFI KHALIL

US52 patents

⚠️ This page may combine multiple inventors who share the name “NAJAFI KHALIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAJAFI KHALIL

UNIV MICHIGAN

Microstructures

Process for making microstructures and microstructures made thereby

Single channel microstimulator

Microelectromechanical capacitive accelerometer and method of making same

Single-side microelectromechanical capacitive accelerometer and method of making same

Thermopile infrared detector with semiconductor supporting rim

Method of manufacturing thermopile infrared detector

Method of fabricating a package with substantially vertical feedthroughs for micromachined or MEMS devices

Environment-resistant module, micropackage and methods of manufacturing same

Environment-resistant module, micropackage and methods of manufacturing same

Single-side microelectromechanical capacitive acclerometer and method of making same

Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having same

Method and micro power generator for generating electrical power from low frequency vibrational energy

Low temperature method for forming a microcavity on a substrate and article having same

Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication

Single-side microelectromechanical capacitive accelerometer and method of making same

Multi-substrate package and method for assembling same

Method of joining an insulator element to a substrate

Micropump assembly for a microgas chromatograph and the like

Method of fabricating a device having a desired non-planar surface or profile and device produced thereby

Method of making a thick microstructural oxide layer

Demodulator, chip and method for digitally demodulating an FSK signal

UNIV MICHIGAN REGENTS

Assembly processes for three-dimensional microstructures

Three dimensional microstructures and fabrication process

Gyroscope and fabrication process

Microsystem device and methods for fabricating the same

Electromagnetic energy transducer

Multi-axis piezoelectric transducer

Actuation and sensing platform for sensor calibration and vibration isolation

Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices

Environment-resistant module, micropackage and methods of manufacturing same

Fluid flow sensor

Full-wave charge pump with low-voltage startup

High aspect-ratio low noise multi-axis accelerometers

Thermoelectric micro-module with high leg density for energy harvesting and cooling applications

Three dimensional microstructures and fabrication process

Vibrational energy harvester with amplifier having gear assembly

Gyroscope and fabrication process

Micro-hydraulic device

Method of manufacturing a probe array

Thermal control mold for making three-dimensional microstructures

Stacked balanced resonators

NAJAFI KHALIL

Environment-resistant module, micropackage and methods of manufacturing same

Gyroscope and method of fabricating a resonator for a gyroscope

Probes having deployable sites and methods for making the same

Method of making a thin film device

ENERTIA MICROSYSTEMS INC

Vibratory gyroscopes with resonator attachments

Vibratory gyroscopes with resonator attachments

(unassigned)

Microelectromechanical capactive accelerometer and method of making same

GALCHEV TZENO

Increased frequency power generation using low-frequency ambient vibrations