Inventor
SHOO WEN LONG FAVIER
SG3 patents
Patents
3 patentsUS11328929B2May 10, 2022
Methods, apparatuses and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC2 citations71
US11670513B2Jun 6, 2023
Apparatus and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC0 citations60
US11114288B2Sep 7, 2021
Physical vapor deposition apparatus
APPLIED MATERIALS INC0 citations59