Inventor
CHANG PANG-SHENG
TW4 patents
Patents
4 patentsUS12506034B2Dec 23, 2025
Polishing interconnect structures in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11978664B2May 7, 2024
Polishing interconnect structures in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11430691B2Aug 30, 2022
Polishing interconnect structures in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10755945B2Aug 25, 2020
Metal contacts on metal gates and methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61