Inventor
DOEHLER JOACHIM
US27 patents
⚠️ This page may combine multiple inventors who share the name “DOEHLER JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENERGY CONVERSION DEVICES INC
24 patentsUS4419533ADec 6, 1983
Photovoltaic device having incident radiation directing means for total internal reflection
ENERGY CONVERSION DEVICES INC172 citations99
US6028393AFeb 22, 2000
E-beam/microwave gas jet PECVD method and apparatus for depositing and/or surface modification of thin film materials
ENERGY CONVERSION DEVICES INC113 citations98
US5223308AJun 29, 1993
Low temperature plasma enhanced CVD process within tubular members
ENERGY CONVERSION DEVICES INC74 citations96
US4664951AMay 12, 1987
Method provided for corrective lateral displacement of a longitudinally moving web held in a planar configuration
ENERGY CONVERSION DEVICES INC64 citations96
US4883686ANov 28, 1989
Method for the high rate plasma deposition of high quality material
ENERGY CONVERSION DEVICES INC100 citations95
US4438724AMar 27, 1984
Grooved gas gate
ENERGY CONVERSION DEVICES INC84 citations95
US6186090B1Feb 13, 2001
Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor
ENERGY CONVERSION DEVICES INC122 citations94
US5093149AMar 3, 1992
Method of depositing directly activated species onto a remotely located substrate
ENERGY CONVERSION DEVICES INC38 citations92
US4893584AJan 16, 1990
Large area microwave plasma apparatus
ENERGY CONVERSION DEVICES INC36 citations92
US4450786AMay 29, 1984
Grooved gas gate
ENERGY CONVERSION DEVICES INC41 citations92
US5126635AJun 30, 1992
Microwave plasma operation using a high power microwave transmissive window assembly
ENERGY CONVERSION DEVICES INC28 citations91
US4937094AJun 26, 1990
Method of creating a high flux of activated species for reaction with a remotely located substrate
ENERGY CONVERSION DEVICES INC49 citations91
US6463874B1Oct 15, 2002
Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor
ENERGY CONVERSION DEVICES INC24 citations89
US4729341AMar 8, 1988
Method and apparatus for making electrophotographic devices
ENERGY CONVERSION DEVICES INC34 citations89
US5743970AApr 28, 1998
Photovoltaic module having an injection molded encapsulant
ENERGY CONVERSION DEVICES INC47 citations87
US5374313ADec 20, 1994
Magnetic roller gas gate employing transonic sweep gas flow to isolate regions of differing gaseous composition or pressure
ENERGY CONVERSION DEVICES INC19 citations82
US4736304AApr 5, 1988
Method and apparatus for operating one or more deposition systems
ENERGY CONVERSION DEVICES INC20 citations82
US4440107AApr 3, 1984
Magnetic apparatus for reducing substrate warpage
ENERGY CONVERSION DEVICES INC26 citations75
US6209482B1Apr 3, 2001
Large area microwave plasma apparatus with adaptable applicator
ENERGY CONVERSION DEVICES INC12 citations74
US4626447ADec 2, 1986
Plasma confining apparatus
ENERGY CONVERSION DEVICES INC8 citations74
US4478173AOct 23, 1984
Method and apparatus for sensing and controlling the intensity of energy in a deposition system
ENERGY CONVERSION DEVICES INC17 citations74
US4931756AJun 5, 1990
High power microwave transmissive window assembly
ENERGY CONVERSION DEVICES INC15 citations72
US4479455AOct 30, 1984
Process gas introduction and channeling system to produce a profiled semiconductor layer
ENERGY CONVERSION DEVICES INC16 citations69
US6878207B2Apr 12, 2005
Gas gate for isolating regions of differing gaseous pressure
ENERGY CONVERSION DEVICES INC5 citations59