Inventor

BOSE FRANK A

US3 patents

⚠️ This page may combine multiple inventors who share the name “BOSE FRANK A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LSI LOGIC CORP

2 patents

US5556549ASep 17, 1996

Power control and delivery in plasma processing equipment

LSI LOGIC CORP257 citations97

US5474648ADec 12, 1995

Uniform and repeatable plasma processing

LSI LOGIC CORP237 citations97

APPLIED MATERIALS INC

1 patent

US6629881B1Oct 7, 2003

Method and apparatus for controlling slurry delivery during polishing

APPLIED MATERIALS INC11 citations69