Inventor

DEGUCHI YOUICHI

JP3 patents

Patents

3 patents

US5665166ASep 9, 1997

Plasma processing apparatus

TOKYO ELECTRON LTD190 citations98

US5591269AJan 7, 1997

Vacuum processing apparatus

TOKYO ELECTRON LTD337 citations98

US5478429ADec 26, 1995

Plasma process apparatus

TOKYO ELECTRON LTD473 citations98