Inventor
VENDER DAVID
NL2 patents
Patents
2 patentsUS5798016AAug 25, 1998
Apparatus for hot wall reactive ion etching using a dielectric or metallic liner with temperature control to achieve process stability
IBM219 citations96
US5637237AJun 10, 1997
Method for hot wall reactive ion etching using a dielectric or metallic liner with temperature control to achieve process stability
IBM68 citations94