Inventor · disambiguated record
Bao-Ju Young
Also filed as: YOUNG BAO-JU
3 granted patents·151 citations·filing 1999–2001
76Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0195US6514672B2Dry development process for a bi-layer resist systemTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Feb 4, 2003·113 cites·13 claims
- 0259US6268287B1Polymerless metal hard mask etchingTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jul 31, 2001·25 cites·30 claims
- 0353US6255022B1Dry development process for a bi-layer resist system utilized to reduce microloadingTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jul 3, 2001·13 cites·20 claims
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