Inventor
LYDEN HENRY A
US8 patents
Patents
8 patentsUS6415858B1Jul 9, 2002
Temperature control system for a workpiece chuck
TEMPTRONIC CORP127 citations97
US6091060AJul 18, 2000
Power and control system for a workpiece chuck
TEMPTRONIC CORP111 citations96
US6540014B2Apr 1, 2003
Workpiece chuck
TEMPTRONIC CORP55 citations95
US6073681AJun 13, 2000
Workpiece chuck
TEMPTRONIC CORP64 citations95
US6019164AFeb 1, 2000
Workpiece chuck
TEMPTRONIC CORP44 citations94
US6033107AMar 7, 2000
Temperature mapping system
TEMPTRONIC CORP34 citations92
US6802368B2Oct 12, 2004
Temperature control system for a workpiece chuck
TEMPTRONIC CORP20 citations91
US6375176B1Apr 23, 2002
Workpiece chuck with guard layer having vacuum distribution pattern
TEMPTRONIC CORP35 citations90