Inventor

BAST RONALD

NL3 patents

Patents

3 patents

US6746237B2Jun 8, 2004

Method and device for heat treating substrates

ASM INT48 citations93

US6561798B2May 13, 2003

Apparatus for processing a wafer

ASM INT13 citations75

US6964751B2Nov 15, 2005

Method and device for heat treating substrates

ASM INT10 citations70