Inventor
FELDMAN MARTIN
US36 patents
⚠️ This page may combine multiple inventors who share the name “FELDMAN MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV LOUISIANA STATE
12 patentsUS5424549AJun 13, 1995
Scanning systems for high resolution e-beam and X-ray lithography
UNIV LOUISIANA STATE91 citations96
US6440619B1Aug 27, 2002
Method of distortion compensation by irradiation of adaptive lithography membrane masks
UNIV LOUISIANA STATE20 citations92
US6226120B1May 1, 2001
Three-dimensional microstructures, and methods for making three-dimensional microstructures
UNIV LOUISIANA STATE29 citations92
US6018422AJan 25, 2000
Three-dimensional microstructures and methods for making three-dimensional microstructures
UNIV LOUISIANA STATE31 citations92
US6332050B1Dec 18, 2001
Optical slab waveguide for massive, high-speed interconnects
UNIV LOUISIANA STATE31 citations89
US6404481B1Jun 11, 2002
Adaptive lithography membrane masks
UNIV LOUISIANA STATE14 citations82
US5263073ANov 16, 1993
Scanning systems for high resolution E-beam and X-ray lithography
UNIV LOUISIANA STATE15 citations74
US5123743AJun 23, 1992
Lithography mask inspection
UNIV LOUISIANA STATE16 citations74
US6246477B1Jun 12, 2001
High resolution scanning microscope
UNIV LOUISIANA STATE6 citations63
US6792175B2Sep 14, 2004
Optical crossbar switch
UNIV LOUISIANA STATE5 citations59
US11112592B2Sep 7, 2021
Fine focus microscope control
UNIV LOUISIANA STATE0 citations52
US7715109B2May 11, 2010
Digital image pointing and digital zoom optical system
UNIV LOUISIANA STATE0 citations52
BELL TELEPHONE LABOR INC
7 patentsUS4326805AApr 27, 1982
Method and apparatus for aligning mask and wafer members
BELL TELEPHONE LABOR INC136 citations95
US4037969AJul 26, 1977
Zone plate alignment marks
BELL TELEPHONE LABOR INC116 citations93
US4398824AAug 16, 1983
Wafer tilt compensation in zone plate alignment system
BELL TELEPHONE LABOR INC43 citations92
US4026653AMay 31, 1977
Proximity printing method
BELL TELEPHONE LABOR INC64 citations91
US3963354AJun 15, 1976
Inspection of masks and wafers by image dissection
BELL TELEPHONE LABOR INC51 citations91
US3998639ADec 21, 1976
Methods for determining feature-size accuracy of circuit patterns
BELL TELEPHONE LABOR INC15 citations72
US3943529AMar 9, 1976
Control of scanning laser beam
BELL TELEPHONE LABOR INC13 citations70
AT & T BELL LAB
7 patentsUS4595289AJun 17, 1986
Inspection system utilizing dark-field illumination
AT & T BELL LAB157 citations94
US5025165AJun 18, 1991
Method for producing a semiconductor device using an electron beam exposure tool and apparatus for producing the device
AT & T BELL LAB25 citations92
US4636080AJan 13, 1987
Two-dimensional imaging with line arrays
AT & T BELL LAB27 citations92
US5078482AJan 7, 1992
Resolution confocal microscope, and device fabrication method using same
AT & T BELL LAB22 citations89
US4614433ASep 30, 1986
Mask-to-wafer alignment utilizing zone plates
AT & T BELL LAB20 citations78
US4626103ADec 2, 1986
Focus tracking system
AT & T BELL LAB19 citations77
US5004321AApr 2, 1991
Resolution confocal microscope, and device fabrication method using same
AT & T BELL LAB11 citations70
FELDMAN MARTIN
6 patentsUS5018236AMay 28, 1991
Roller-type paint applicator
FELDMAN MARTIN3 citations62
US11559204B2Jan 24, 2023
Contact-type endoscope SERS probe, and related methods
FELDMAN MARTIN0 citations58
US8323183B2Dec 4, 2012
Forward looking optical coherence tomography endoscope
FELDMAN MARTIN3 citations58
US10842382B2Nov 24, 2020
Contact-type endoscope SERS probe, and related methods
FELDMAN MARTIN0 citations47
US10085646B2Oct 2, 2018
Contact-type endoscope SERS probe, and related methods
FELDMAN MARTIN0 citations47
US8233154B2Jul 31, 2012
High precision code plates and geophones
FELDMAN MARTIN0 citations41