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Inventor
HEIMANN PETER A
US
2 patents
⚠️ This page may combine multiple inventors who share the name “HEIMANN PETER A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AMERICAN TELEPHONE & TELEGRAPH
1 patent
US4680084A
Jul 14, 1987
Interferometric methods and apparatus for device fabrication
AMERICAN TELEPHONE & TELEGRAPH
48 citations
90
AT & T BELL LAB
1 patent
US4614433A
Sep 30, 1986
Mask-to-wafer alignment utilizing zone plates
AT & T BELL LAB
20 citations
78