Inventor
WHITE DONALD L
US20 patents
⚠️ This page may combine multiple inventors who share the name “WHITE DONALD L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AT & T BELL LAB
7 patentsUS5339346AAug 16, 1994
Device fabrication entailing plasma-derived x-ray delineation
AT & T BELL LAB155 citations99
US4947413AAug 7, 1990
Resolution doubling lithography technique
AT & T BELL LAB148 citations94
US5229255AJul 20, 1993
Sub-micron device fabrication with a phase shift mask having multiple values of phase delay
AT & T BELL LAB42 citations92
US5320918AJun 14, 1994
Optical lithographical imaging system including optical transmission diffraction devices
AT & T BELL LAB25 citations90
US4614433ASep 30, 1986
Mask-to-wafer alignment utilizing zone plates
AT & T BELL LAB20 citations78
US5217831AJun 8, 1993
Sub-micron device fabrication
AT & T BELL LAB17 citations74
US5091979AFeb 25, 1992
Sub-micron imaging
AT & T BELL LAB15 citations74
AT & T CORP
4 patentsUS5439781AAug 8, 1995
Device fabrication entailing synchrotron radiation
AT & T CORP82 citations93
US5521031AMay 28, 1996
Pattern delineating apparatus for use in the EUV spectrum
AT & T CORP34 citations92
US5510230AApr 23, 1996
Device fabrication using DUV/EUV pattern delineation
AT & T CORP39 citations92
US5498923AMar 12, 1996
Fluoresence imaging
AT & T CORP15 citations73