Inventor
ZHAO CHUANGXIN
NL2 patents
Patents
2 patentsUS10222701B2Mar 5, 2019
Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
ASML NETHERLANDS BV11 citations78
US10042260B2Aug 7, 2018
Device for monitoring a radiation source, radiation source, method of monitoring a radiation source, device manufacturing method
ASML NETHERLANDS BV0 citations46