Inventor
CHAO HSIN-LUNG
TW5 patents
Patents
5 patentsUS9515184B2Dec 6, 2016
Semiconductor arrangement with multiple-height fins and substrate trenches
TAIWAN SEMICONDUCTOR MFG CO LTD20 citations90
US10840143B2Nov 17, 2020
Methods for forming a semiconductor arrangement of fins having multiple heights and an alignment mark
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US9911658B2Mar 6, 2018
Methods for forming a semiconductor arrangement with multiple-height fins and substrate trenches
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11469144B2Oct 11, 2022
Semiconductor arrangement with fin features having different heights
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10177036B2Jan 8, 2019
Semiconductor arrangement with fins having multiple heights and a dielectric layer recessed in the substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50