Inventor
WAKUI SHINJI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “WAKUI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
21 patentsUS6378672B1Apr 30, 2002
Active vibration isolation device and its control method
CANON KK80 citations98
US6170622B1Jan 9, 2001
Anti-vibration apparatus and anti-vibration method thereof
CANON KK83 citations98
US5504407AApr 2, 1996
Stage driving system
CANON KK152 citations98
US6327026B1Dec 4, 2001
Exposure apparatus and positioning apparatus
CANON KK54 citations96
US6322060B1Nov 27, 2001
Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method
CANON KK81 citations96
US6286644B1Sep 11, 2001
Active vibration isolator, exposure apparatus, exposure method and device manufacturing method
CANON KK60 citations96
US5900707AMay 4, 1999
Stage-drive control apparatus and method, and scan-projection type exposure apparatus
CANON KK54 citations96
US5653317AAug 5, 1997
Vibration removing apparatus and method thereof
CANON KK53 citations96
US7072777B1Jul 4, 2006
Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method
CANON KK33 citations92
US6359688B2Mar 19, 2002
Projection exposure apparatus and method of controlling same
CANON KK40 citations92
US6213443B1Apr 10, 2001
Anti-vibration apparatus and exposure apparatus using the same
CANON KK27 citations92
US6128552AOct 3, 2000
Anti-vibration apparatus and method
CANON KK27 citations92
US5568032AOct 22, 1996
Position control system
CANON KK41 citations92
US5545962AAug 13, 1996
Positioning system
CANON KK24 citations92
US5511930AApr 30, 1996
Precision positioning apparatus
CANON KK49 citations92
US5478043ADec 26, 1995
Control apparatus for vertical vibration elimination table
CANON KK44 citations92
US6473159B1Oct 29, 2002
Anti-vibration system in exposure apparatus
CANON KK38 citations91
US6477908B1Nov 12, 2002
Pedestal with vibration sensor, and exposure apparatus having the same
CANON KK16 citations84
US6809300B2Oct 26, 2004
Temperature adjusting system in exposure apparatus
CANON KK13 citations82
US6448723B1Sep 10, 2002
Stage system and exposure apparatus
CANON KK13 citations74
US6684132B2Jan 27, 2004
Active anti-vibration apparatus and exposure apparatus
CANON KK8 citations73