Inventor
KHANNA ANIRUDDH
US4 patents
Patents
4 patentsUS10593574B2Mar 17, 2020
Techniques for combining CMP process tracking data with 3D printed CMP consumables
APPLIED MATERIALS INC19 citations93
US10384330B2Aug 20, 2019
Polishing pads produced by an additive manufacturing process
APPLIED MATERIALS INC22 citations93
US10875145B2Dec 29, 2020
Polishing pads produced by an additive manufacturing process
APPLIED MATERIALS INC17 citations85
US10821573B2Nov 3, 2020
Polishing pads produced by an additive manufacturing process
APPLIED MATERIALS INC17 citations85