Inventor
HUANG CHIN-CHOU
US2 patents
Patents
2 patentsUS10466596B2Nov 5, 2019
System and method for field-by-field overlay process control using measured and estimated field parameters
KLA TENCOR CORP4 citations66
US10509329B2Dec 17, 2019
Breakdown analysis of geometry induced overlay and utilization of breakdown analysis for improved overlay control
KLA TENCOR CORP1 citations56