Inventor
AIUCHI SUSUMU
JP22 patents
Patents
22 patentsUS4391511AJul 5, 1983
Light exposure device and method
HITACHI LTD153 citations99
US4405435ASep 20, 1983
Apparatus for performing continuous treatment in vacuum
HITACHI LTD171 citations97
US4615620AOct 7, 1986
Apparatus for measuring the depth of fine engraved patterns
HITACHI LTD56 citations96
US4610770ASep 9, 1986
Method and apparatus for sputtering
HITACHI LTD86 citations96
US4479848AOct 30, 1984
Etching method and apparatus
HITACHI LTD58 citations96
US4808258AFeb 28, 1989
Plasma processing method and apparatus for carrying out the same
HITACHI LTD98 citations95
US4675096AJun 23, 1987
Continuous sputtering apparatus
HITACHI LTD58 citations95
US4628531ADec 9, 1986
Pattern checking apparatus
HITACHI LTD100 citations95
US4401539AAug 30, 1983
Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure
HITACHI LTD90 citations95
US4721553AJan 26, 1988
Method and apparatus for microwave assisting sputtering
HITACHI LTD100 citations94
US7020306B2Mar 28, 2006
Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device
HITACHI LTD35 citations92
US4933565AJun 12, 1990
Method and apparatus for correcting defects of X-ray mask
HITACHI LTD43 citations92
US4925755AMay 15, 1990
Method of correcting defect in circuit pattern
HITACHI LTD40 citations92
US4744660AMay 17, 1988
Apparatus for measuring difference in shallow level
HITACHI LTD36 citations92
US4487678ADec 11, 1984
Dry-etching apparatus
HITACHI LTD28 citations92
US6539959B1Apr 1, 2003
Cleaning apparatus for plate-like part and method thereof
HITACHI LTD22 citations90
US4420233ADec 13, 1983
Projecting apparatus
HITACHI LTD26 citations81
US4840487AJun 20, 1989
Measuring apparatus for etching pits
HITACHI LTD13 citations74
US4536419AAug 20, 1985
Method for forming tapered films
HITACHI LTD8 citations74
US4170418AOct 9, 1979
Alignment apparatus
HITACHI LTD11 citations74
US6693699B2Feb 17, 2004
Image display device and its repairing method and apparatus
HITACHI LTD10 citations71
US6552771B1Apr 22, 2003
Image display device and its repairing method and apparatus
HITACHI LTD12 citations71