Inventor
WU WEI E
US10 patents
⚠️ This page may combine multiple inventors who share the name “WU WEI E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FREESCALE SEMICONDUCTOR INC
6 patentsUS6902969B2Jun 7, 2005
Process for forming dual metal gate structures
FREESCALE SEMICONDUCTOR INC78 citations97
US6969568B2Nov 29, 2005
Method for etching a quartz layer in a photoresistless semiconductor mask
FREESCALE SEMICONDUCTOR INC4 citations62
US6797440B2Sep 28, 2004
Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device
FREESCALE SEMICONDUCTOR INC3 citations61
US6818362B1Nov 16, 2004
Photolithography reticle design
FREESCALE SEMICONDUCTOR INC4 citations60
US7018747B2Mar 28, 2006
Photomask having line end phase anchors
FREESCALE SEMICONDUCTOR INC0 citations51
US7732102B2Jun 8, 2010
Cr-capped chromeless phase lithography
FREESCALE SEMICONDUCTOR INC0 citations39
MOTOROLA INC
4 patentsUS6759675B2Jul 6, 2004
Optical device and method therefor
MOTOROLA INC50 citations95
US6232134B1May 15, 2001
Method and apparatus for monitoring wafer characteristics and/or semiconductor processing consistency using wafer charge distribution measurements
MOTOROLA INC58 citations92
US5543362AAug 6, 1996
Process for fabricating refractory-metal silicide layers in a semiconductor device
MOTOROLA INC25 citations91
US6594422B2Jul 15, 2003
Opto-coupling device structure and method therefor
MOTOROLA INC11 citations71