Inventor
COKER ERIC M
US6 patents
Patents
6 patentsUS7224063B2May 29, 2007
Dual-damascene metallization interconnection
IBM30 citations92
US7470613B2Dec 30, 2008
Dual damascene multi-level metallization
IBM7 citations73
US7382055B2Jun 3, 2008
Integrated thin-film resistor with direct contact
IBM7 citations73
US7303972B2Dec 4, 2007
Integrated thin-film resistor with direct contact
IBM6 citations73
US6760901B2Jul 6, 2004
Trough adjusted optical proximity correction for vias
IBM2 citations61
US7494748B2Feb 24, 2009
Method for correction of defects in lithography masks
IBM0 citations40