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Inventor
MATSUDAI MASASUKE
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “MATSUDAI MASASUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
1 patent
US7347919B2
Mar 25, 2008
Sputter source, sputtering device, and sputtering method
ULVAC INC
10 citations
77
NAMEKAWA TAKUMI
1 patent
US8205952B2
Jun 26, 2012
Spacer placing method
NAMEKAWA TAKUMI
0 citations
43