Inventor
FUJISATO TOSHIAKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “FUJISATO TOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7337745B1Mar 4, 2008
Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor
TOKYO ELECTRON LTD83 citations97
US11104991B2Aug 31, 2021
Processing apparatus and cover member
TOKYO ELECTRON LTD2 citations71
US11441224B2Sep 13, 2022
Method of controlling substrate processing apparatus, and substrate processing apparatus
TOKYO ELECTRON LTD2 citations70
US11396704B2Jul 26, 2022
Substrate holder and film forming apparatus
TOKYO ELECTRON LTD3 citations68
US10998204B2May 4, 2021
Method of processing substrate and substrate processing apparatus
TOKYO ELECTRON LTD1 citations62
US11280002B2Mar 22, 2022
Placement apparatus and processing apparatus
TOKYO ELECTRON LTD0 citations50
US11466365B2Oct 11, 2022
Film-forming apparatus
TOKYO ELECTRON LTD0 citations49
US10340176B2Jul 2, 2019
Substrate mounting method and substrate mounting device
TOKYO ELECTRON LTD0 citations49
US10522467B2Dec 31, 2019
Ruthenium wiring and manufacturing method thereof
TOKYO ELECTRON LTD0 citations38
US9253862B2Feb 2, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38