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Inventor
OBRIEN GARY
US
2 patents
Patents
2 patents
US9908771B2
Mar 6, 2018
Inertial and pressure sensors on single chip
BOSCH GMBH ROBERT
4 citations
67
US9903763B2
Feb 27, 2018
Titanium nitride for MEMS bolometers
BOSCH GMBH ROBERT
0 citations
38