Inventor
YOKOHARA HIROYUKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “YOKOHARA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS11193200B2Dec 7, 2021
PVD processing method and PVD processing apparatus
TOKYO ELECTRON LTD1 citations61
US10254693B2Apr 9, 2019
Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member
TOKYO ELECTRON LTD1 citations60
US11605547B2Mar 14, 2023
Temperature measuring mechanism, temperature measuring method, and stage device
TOKYO ELECTRON LTD0 citations59
US11417504B2Aug 16, 2022
Stage device and processing apparatus
TOKYO ELECTRON LTD1 citations59
US12077848B2Sep 3, 2024
Vacuum processing apparatus
TOKYO ELECTRON LTD0 citations49
US11551918B2Jan 10, 2023
Film forming apparatus
TOKYO ELECTRON LTD0 citations48