Inventor

MEHTA SOHAN S

US2 patents

Patents

2 patents

US10504774B2Dec 10, 2019

Lithographic patterning to form fine pitch features

GLOBALFOUNDRIES INC1 citations56

US10353288B2Jul 16, 2019

Litho-litho-etch double patterning method

GLOBALFOUNDRIES INC0 citations35