Inventor
TACHIKAWA TOSHIFUMI
JP5 patents
Patents
5 patentsUS9754768B2Sep 5, 2017
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD59 citations97
US9355822B2May 31, 2016
Plasma processing apparatus
TOKYO ELECTRON LTD67 citations96
US10593519B2Mar 17, 2020
Plasma processing apparatus
TOKYO ELECTRON LTD45 citations93
US10109461B2Oct 23, 2018
Plasma processing method
TOKYO ELECTRON LTD41 citations93
US9734992B2Aug 15, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD43 citations93