Inventor
OHBA KAZUMA
JP3 patents
Patents
3 patentsUS11456189B2Sep 27, 2022
Member for semiconductor manufacturing apparatuses
NGK INSULATORS LTD2 citations69
US8361271B2Jan 29, 2013
Ceramic-metal bonded body and method of producing the same
NGK INSULATORS LTD4 citations58
US10037910B2Jul 31, 2018
Wafer holder and method for manufacturing the same
NGK INSULATORS LTD0 citations45