Inventor
KATAIGI TAKASHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KATAIGI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
7 patentsUS9165813B2Oct 20, 2015
Semiconductor manufacturing apparatus member
NGK INSULATORS LTD10 citations78
US11282734B2Mar 22, 2022
Electrostatic chuck and method for manufacturing the same
NGK INSULATORS LTD2 citations71
US11456189B2Sep 27, 2022
Member for semiconductor manufacturing apparatuses
NGK INSULATORS LTD2 citations69
US9438140B2Sep 6, 2016
Member for semiconductor manufacturing apparatus
NGK INSULATORS LTD3 citations67
US9255747B2Feb 9, 2016
Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus
NGK INSULATORS LTD2 citations61
US9257315B2Feb 9, 2016
Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus
NGK INSULATORS LTD2 citations61
US9583372B2Feb 28, 2017
Structure for joining ceramic plate to metal cylindrical member
NGK INSULATORS LTD0 citations46