Inventor
LISCHKE BURKHARD
DE27 patents
Patents
27 patentsUS4899060AFeb 6, 1990
Diaphragm system for generating a plurality of particle probes haivng variable cross section
SIEMENS AG160 citations99
US4985681AJan 15, 1991
Particle beam measuring method for non-contact testing of interconnect networks
SIEMENS AG55 citations96
US4786149ANov 22, 1988
Arrangement for optical image processing
SIEMENS AG73 citations96
US4724328AFeb 9, 1988
Lithographic apparatus for the production of microstructures
SIEMENS AG119 citations96
US4994336AFeb 19, 1991
Method for manufacturing a control plate for a lithographic device
SIEMENS AG84 citations95
US4982099AJan 1, 1991
Aperture diaphragm for a lithography apparatus
SIEMENS AG42 citations92
US4954705ASep 4, 1990
Method for examining a specimen in a particle beam instrument
SIEMENS AG35 citations92
US4714833ADec 22, 1987
Arrangement for detecting secondary and/or backscatter electrons in an electron beam apparatus
SIEMENS AG37 citations92
US4573008AFeb 25, 1986
Method for the contact-free testing of microcircuits or the like with a particle beam probe
SIEMENS AG39 citations92
US4514638AApr 30, 1985
Electron-optical system with variable-shaped beam for generating and measuring microstructures
SIEMENS AG31 citations92
US4540885ASep 10, 1985
Spectrometer objective having parallel objective fields and spectrometer fields for the potential measuring technique
SIEMENS AG28 citations91
US4140913AFeb 20, 1979
Charged-particle beam optical apparatus for the reduction imaging of a mask on a specimen
SIEMENS AG32 citations91
US4587481AMay 6, 1986
Arrangement for testing micro interconnections and a method for operating the same
SIEMENS AG21 citations82
US4551625ANov 5, 1985
Spectrometer objective for particle beam measurement technique
SIEMENS AG22 citations82
US5049460ASep 17, 1991
Method for producing beam-shaping diaphragms for lithographic devices
SIEMENS AG20 citations81
US4924136AMay 8, 1990
Beam generating system for electron beam measuring instruments having cathode support structure
SIEMENS AG6 citations74
US4677296AJun 30, 1987
Apparatus and method for measuring lengths in a scanning particle microscope
SIEMENS AG18 citations74
US4628258ADec 9, 1986
Method and apparatus for electrical testing of microwired structures with the assistance of particle probes
SIEMENS AG9 citations74
US4164658AAug 14, 1979
Charged-particle beam optical apparatus for imaging a mask on a specimen
SIEMENS AG16 citations72
US4393308AJul 12, 1983
High current electron source
SIEMENS AG10 citations70
US4136285AJan 23, 1979
Method for irradiating a specimen by corpuscular-beam radiation
SIEMENS AG12 citations70
US5128207AJul 7, 1992
Method for producing uniform polymethylmethacrylate layers
SIEMENS AG8 citations68
US4623836ANov 18, 1986
Sampling method for fast potential determination in electron beam mensuration
SIEMENS AG6 citations63
US4601971AJul 22, 1986
Tunnel cathode mask for electron lithography and method for manufacturing and operating it
SIEMENS AG4 citations63
US4246487AJan 20, 1981
Method and device for determining the focal length of a long focal length electron optical lens
SIEMENS AG6 citations62
US4238680ADec 9, 1980
Method and device for setting and correcting errors of an electron optical condenser of a microprojector
SIEMENS AG6 citations62
US4168434ASep 18, 1979
Long focal length magnetic lens for the optical imaging of a specimen having a large surface area
SIEMENS AG6 citations59