Inventor

FISHBEIN MARVIN

2 patents

Patents

2 patents

US4338548AJul 6, 1982

Unipotential lens assembly for charged particle beam tubes and method for applying correction potentials thereto

CONTROL DATA CORP41 citations89

US4675528AJun 23, 1987

Method for measurement of spotsize and edgewidth in electron beam lithography

CONTROL DATA CORP24 citations77