Inventor
MIZUKOSHI KATSURO
JP7 patents
Patents
7 patentsUS4687939AAug 18, 1987
Method and apparatus for forming film by ion beam
HITACHI LTD83 citations96
US4463073AJul 31, 1984
Method and apparatus for redressing defective photomask
HITACHI LTD59 citations95
US5182231AJan 26, 1993
Method for modifying wiring of semiconductor device
HITACHI LTD56 citations94
US5026664AJun 25, 1991
Method of providing a semiconductor IC device with an additional conduction path
HITACHI LTD35 citations92
US4566765AJan 28, 1986
Apparatus for summing several ring-shape laser beams
HITACHI LTD51 citations92
US4510222AApr 9, 1985
Photomask with corrected white defects
HITACHI LTD42 citations92
US4444801AApr 24, 1984
Method and apparatus for correcting transparent defects on a photomask
HITACHI LTD51 citations92