Inventor

ULRICH WILLI

DE4 patents

⚠️ This page may combine multiple inventors who share the name “ULRICH WILLI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS STIFTUNG

2 patents

US6424471B1Jul 23, 2002

Catadioptric objective with physical beam splitter

ZEISS STIFTUNG40 citations91

US5475197ADec 12, 1995

Process and apparatus for the ablation of a surface

ZEISS STIFTUNG27 citations90

ZEISS CARL SEMICONDUCTOR MFG

1 patent

US6728036B2Apr 27, 2004

Diffractive optical element and also optical arrangement comprising a diffractive optical element

ZEISS CARL SEMICONDUCTOR MFG35 citations91

ZEISS CARL SMT AG

1 patent

US7149030B2Dec 12, 2006

Diffractive optical element and also optical arrangement comprising a diffractive optical element

ZEISS CARL SMT AG5 citations70