P

Inventor

FUKASAWA KIMIHIRO

JP5 patents
⚠️ This page may combine multiple inventors who share the name “FUKASAWA KIMIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US7409253B2Aug 5, 2008

System and method for processing a substrate and program therefor

TOKYO ELECTRON LTD10 citations76
US10254774B2Apr 9, 2019

Temperature control method, control apparatus, and plasma processing apparatus

TOKYO ELECTRON LTD4 citations69
US9299540B2Mar 29, 2016

Plasma processing apparatus, plasma processing method, and storage medium

TOKYO ELECTRON LTD0 citations48

KATO YOSHIYUKI

1 patent
US9236230B2Jan 12, 2016

Plasma processing apparatus and gas supply method therefor

KATO YOSHIYUKI3 citations71

OGI TATSUYA

1 patent
US8864934B2Oct 21, 2014

Plasma processing apparatus, plasma processing method, and storage medium

OGI TATSUYA0 citations46