Inventor

KANAYA KAZUHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KANAYA KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7409253B2Aug 5, 2008

System and method for processing a substrate and program therefor

TOKYO ELECTRON LTD10 citations76

US9299540B2Mar 29, 2016

Plasma processing apparatus, plasma processing method, and storage medium

TOKYO ELECTRON LTD0 citations48

OGI TATSUYA

1 patent

US8864934B2Oct 21, 2014

Plasma processing apparatus, plasma processing method, and storage medium

OGI TATSUYA0 citations46