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Inventor
CHENG JULI
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “CHENG JULI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA—TENCOR CORP
1 patent
US10598477B2
Mar 24, 2020
Dynamic determination of metal film thickness from sheet resistance and TCR value
KLA—TENCOR CORP
0 citations
46
KLA TENCOR CORP
1 patent
US10663279B2
May 26, 2020
Dynamic determination of metal film thickness from sheet resistance and TCR value
KLA TENCOR CORP
0 citations
35