Inventor
VAN VOORST PETER DANNY
NL9 patents
Patents
9 patentsUS10451559B2Oct 22, 2019
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV3 citations72
US10330606B2Jun 25, 2019
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV3 citations72
US10725381B2Jul 28, 2020
Optical systems, metrology apparatus and associated method
ASML NETHERLANDS BV3 citations71
US10185224B2Jan 22, 2019
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV3 citations70
US11815402B2Nov 14, 2023
Wavefront sensor and associated metrology apparatus
ASML NETHERLANDS BV0 citations60
US10670974B2Jun 2, 2020
Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate
ASML NETHERLANDS BV1 citations60
US11129266B2Sep 21, 2021
Optical system, metrology apparatus and associated method
ASML NETHERLANDS BV0 citations59
US11243470B2Feb 8, 2022
Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method
ASML NETHERLANDS BV0 citations49
US9811001B2Nov 7, 2017
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV0 citations39