Inventor
HORIKAWA TSUYOSHI
JP34 patents
⚠️ This page may combine multiple inventors who share the name “HORIKAWA TSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
24 patentsUS6470144B1Oct 22, 2002
Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby
MITSUBISHI ELECTRIC CORP66 citations96
US6312526B1Nov 6, 2001
Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device
MITSUBISHI ELECTRIC CORP45 citations96
US6101085AAug 8, 2000
High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film
MITSUBISHI ELECTRIC CORP40 citations96
US5834060ANov 10, 1998
High dielectric constant thin film structure method for forming high dielectric constant thin film and apparatus for forming high dielectric contact thin film
MITSUBISHI ELECTRIC CORP62 citations96
US6110291AAug 29, 2000
Thin film forming apparatus using laser
MITSUBISHI ELECTRIC CORP67 citations94
US6638880B2Oct 28, 2003
Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device
MITSUBISHI ELECTRIC CORP23 citations92
US6563182B2May 13, 2003
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP43 citations92
US6273957B1Aug 14, 2001
Vaporizing device for CVD source materials and CVD apparatus employing the same
MITSUBISHI ELECTRIC CORP28 citations92
US6239460B1May 29, 2001
Semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium
MITSUBISHI ELECTRIC CORP36 citations92
US6235649B1May 22, 2001
Method of forming high dielectric constant thin film and method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP16 citations92
US6179920B1Jan 30, 2001
CVD apparatus for forming thin film having high dielectric constant
MITSUBISHI ELECTRIC CORP43 citations92
US6110283AAug 29, 2000
Chemical vapor deposition apparatus
MITSUBISHI ELECTRIC CORP47 citations92
US6049103AApr 11, 2000
Semiconductor capacitor
MITSUBISHI ELECTRIC CORP30 citations92
US6187622B1Feb 13, 2001
Semiconductor memory device and method for producing the same
MITSUBISHI ELECTRIC CORP19 citations84
US5989635ANov 23, 1999
High dielectric constant thin film structure, method for forming high dielectric constant thin film and apparatus for forming high dielectric constant thin film
MITSUBISHI ELECTRIC CORP14 citations82
US5231282AJul 27, 1993
Optical writing type liquid crystal light valve and writing apparatus therefor
MITSUBISHI ELECTRIC CORP20 citations79
US6512885B1Jan 28, 2003
Liquid raw material vaporizer, semiconductor device and method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP9 citations74
US6117482ASep 12, 2000
Method and apparatus for monitoring CVD liquid source for forming thin film with high dielectric constant
MITSUBISHI ELECTRIC CORP8 citations74
US5882410AMar 16, 1999
High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film
MITSUBISHI ELECTRIC CORP11 citations74
US5939744AAug 17, 1999
Semiconductor device with x-ray absorption layer
MITSUBISHI ELECTRIC CORP10 citations73
US6165556ADec 26, 2000
High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film
MITSUBISHI ELECTRIC CORP1 citations63
US6420191B2Jul 16, 2002
Method of manufacturing semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium
MITSUBISHI ELECTRIC CORP2 citations62
US5281806AJan 25, 1994
Optical writing type liquid crystal light valve and writing apparatus therefor
MITSUBISHI ELECTRIC CORP3 citations59
US6448191B2Sep 10, 2002
Method of forming high dielectric constant thin film and method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations52
RENESAS ELECTRONICS CORP
3 patentsUS10162110B2Dec 25, 2018
Semiconductor device and method for manufacturing the same
RENESAS ELECTRONICS CORP1 citations52
US9985149B2May 29, 2018
Semiconductor device and method of manufacturing the same
RENESAS ELECTRONICS CORP0 citations41
US10078182B2Sep 18, 2018
Semiconductor device and method for manufacturing the same
RENESAS ELECTRONICS CORP0 citations40
RENESAS TECH CORP
2 patentsOKI ELECTRIC IND CO LTD
2 patentsUS9335475B2May 10, 2016
Method of manufacturing an optical device having a stepwise or tapered light input/output part
OKI ELECTRIC IND CO LTD8 citations83
US9869815B2Jan 16, 2018
Optical device having a stepwise or tapered light input/output part and manufacturing method therefor
OKI ELECTRIC IND CO LTD4 citations72