P

Inventor

HORIKAWA TSUYOSHI

JP34 patents
⚠️ This page may combine multiple inventors who share the name “HORIKAWA TSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

24 patents
US6470144B1Oct 22, 2002

Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby

MITSUBISHI ELECTRIC CORP66 citations96
US6312526B1Nov 6, 2001

Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device

MITSUBISHI ELECTRIC CORP45 citations96
US6101085AAug 8, 2000

High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film

MITSUBISHI ELECTRIC CORP40 citations96
US5834060ANov 10, 1998

High dielectric constant thin film structure method for forming high dielectric constant thin film and apparatus for forming high dielectric contact thin film

MITSUBISHI ELECTRIC CORP62 citations96
US6110291AAug 29, 2000

Thin film forming apparatus using laser

MITSUBISHI ELECTRIC CORP67 citations94
US6638880B2Oct 28, 2003

Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device

MITSUBISHI ELECTRIC CORP23 citations92
US6563182B2May 13, 2003

Semiconductor device and manufacturing method thereof

MITSUBISHI ELECTRIC CORP43 citations92
US6273957B1Aug 14, 2001

Vaporizing device for CVD source materials and CVD apparatus employing the same

MITSUBISHI ELECTRIC CORP28 citations92
US6239460B1May 29, 2001

Semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium

MITSUBISHI ELECTRIC CORP36 citations92
US6235649B1May 22, 2001

Method of forming high dielectric constant thin film and method of manufacturing semiconductor device

MITSUBISHI ELECTRIC CORP16 citations92
US6179920B1Jan 30, 2001

CVD apparatus for forming thin film having high dielectric constant

MITSUBISHI ELECTRIC CORP43 citations92
US6110283AAug 29, 2000

Chemical vapor deposition apparatus

MITSUBISHI ELECTRIC CORP47 citations92
US6049103AApr 11, 2000

Semiconductor capacitor

MITSUBISHI ELECTRIC CORP30 citations92
US6187622B1Feb 13, 2001

Semiconductor memory device and method for producing the same

MITSUBISHI ELECTRIC CORP19 citations84
US5989635ANov 23, 1999

High dielectric constant thin film structure, method for forming high dielectric constant thin film and apparatus for forming high dielectric constant thin film

MITSUBISHI ELECTRIC CORP14 citations82
US5231282AJul 27, 1993

Optical writing type liquid crystal light valve and writing apparatus therefor

MITSUBISHI ELECTRIC CORP20 citations79
US6512885B1Jan 28, 2003

Liquid raw material vaporizer, semiconductor device and method of manufacturing semiconductor device

MITSUBISHI ELECTRIC CORP9 citations74
US6117482ASep 12, 2000

Method and apparatus for monitoring CVD liquid source for forming thin film with high dielectric constant

MITSUBISHI ELECTRIC CORP8 citations74
US5882410AMar 16, 1999

High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film

MITSUBISHI ELECTRIC CORP11 citations74
US5939744AAug 17, 1999

Semiconductor device with x-ray absorption layer

MITSUBISHI ELECTRIC CORP10 citations73
US6165556ADec 26, 2000

High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film

MITSUBISHI ELECTRIC CORP1 citations63
US6420191B2Jul 16, 2002

Method of manufacturing semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium

MITSUBISHI ELECTRIC CORP2 citations62
US5281806AJan 25, 1994

Optical writing type liquid crystal light valve and writing apparatus therefor

MITSUBISHI ELECTRIC CORP3 citations59
US6448191B2Sep 10, 2002

Method of forming high dielectric constant thin film and method of manufacturing semiconductor device

MITSUBISHI ELECTRIC CORP0 citations52

RENESAS ELECTRONICS CORP

3 patents

RENESAS TECH CORP

2 patents

OKI ELECTRIC IND CO LTD

2 patents

PHOTONICS ELECTRONICS TECHNOLOGY RES ASS

1 patent

FUJI XEROX CO LTD

1 patent

NEC CORP

1 patent