Inventor
HAMALAINEN JANI
FI5 patents
⚠️ This page may combine multiple inventors who share the name “HAMALAINEN JANI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
4 patentsUS10619242B2Apr 14, 2020
Atomic layer deposition of rhenium containing thin films
ASM IP HOLDING BV4 citations71
US11821084B2Nov 21, 2023
Atomic layer deposition of rhenium containing thin films
ASM IP HOLDING BV0 citations60
US11155917B2Oct 26, 2021
Atomic layer deposition of rhenium containing thin films
ASM IP HOLDING BV0 citations60
US9765431B2Sep 19, 2017
Atomic layer deposition of metal phosphates and lithium silicates
ASM IP HOLDING BV0 citations48