Inventor

BEYHAGHI POORIYA

US2 patents

Patents

2 patents

US11240904B2Feb 1, 2022

Apparatus for and method of controlling coalescence of droplets in a droplet stream

ASML NETHERLANDS BV1 citations54

US12324084B2Jun 3, 2025

Apparatus for and method of controlling droplet generator performance

ASML NETHERLANDS BV0 citations43