Inventor

OKAWADA TAKESHI

JP4 patents

Patents

4 patents

US5020969AJun 4, 1991

Turbo vacuum pump

HITACHI LTD55 citations91

US4579508AApr 1, 1986

Turbomolecular pump

HITACHI LTD43 citations91

US4735550AApr 5, 1988

Turbo molecular pump

HITACHI LTD13 citations72

US4732530AMar 22, 1988

Turbomolecular pump

HITACHI LTD8 citations71