Inventor
SHINAGAWA KEISUKE
JP12 patents
Patents
12 patentsUS5478403ADec 26, 1995
Process and apparatus for ashing treatment
FUJITSU LTD246 citations99
US5961775AOct 5, 1999
Apparatus for removing organic resist from semiconductor
FUJITSU LTD483 citations98
US5773201AJun 30, 1998
Method of stripping a resist mask
FUJITSU LTD49 citations95
US5681780AOct 28, 1997
Manufacture of semiconductor device with ashing and etching
FUJITSU LTD57 citations95
US5628871AMay 13, 1997
Method of removing resist mask and a method of manufacturing semiconductor device
FUJITSU LTD80 citations95
US5057187AOct 15, 1991
Ashing method for removing an organic film on a substance of a semiconductor device under fabrication
FUJITSU LTD61 citations95
US4983254AJan 8, 1991
Processing for stripping organic material
FUJITSU LTD62 citations95
US4961820AOct 9, 1990
Ashing method for removing an organic film on a substance of a semiconductor device under fabrication
FUJITSU LTD64 citations95
US5832177ANov 3, 1998
Method for controlling apparatus for supplying steam for ashing process
FUJITSU LTD59 citations94
US5397432AMar 14, 1995
Method for producing semiconductor integrated circuits and apparatus used in such method
FUJITSU LTD53 citations90
US5998104ADec 7, 1999
Method of stripping a resist mask
FUJITSU LTD4 citations62
US6115538ASep 5, 2000
Steam supplying apparatus and method for controlling same
FUJITSU LTD1 citations50