Inventor
RICHTER ANDRE
DE5 patents
⚠️ This page may combine multiple inventors who share the name “RICHTER ANDRE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
3 patentsUS6257955B1Jul 10, 2001
Apparatus and method for heating a liquid or viscous polishing agent, and device for polishing wafers
INFINEON TECHNOLOGIES AG34 citations88
US6506306B1Jan 14, 2003
Method and an apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabrication
INFINEON TECHNOLOGIES AG13 citations81
US6436281B2Aug 20, 2002
Apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabrication
INFINEON TECHNOLOGIES AG11 citations70