Inventor
AKIMOTO TAKESHI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “AKIMOTO TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
8 patentsUS5798544AAug 25, 1998
Semiconductor memory device having trench isolation regions and bit lines formed thereover
NEC CORP105 citations96
US5677824AOct 14, 1997
Electrostatic chuck with mechanism for lifting up the peripheral of a substrate
NEC CORP126 citations95
US5639309AJun 17, 1997
Plasma processing apparatus adjusted for a batch-processing of a plurality of wafers with plasma gases
NEC CORP34 citations92
US5415719AMay 16, 1995
Two parallel plate electrode type dry etching apparatus
NEC CORP30 citations92
US5647912AJul 15, 1997
Plasma processing apparatus
NEC CORP76 citations91
US6189481B1Feb 20, 2001
Microwave plasma processing apparatus
NEC CORP14 citations73
US5668053ASep 16, 1997
Method for fabricating multilayer semiconductor device
NEC CORP10 citations73
US5614025AMar 25, 1997
Plasma processing apparatus
NEC CORP6 citations62
SUMITOMO METAL IND
4 patentsUS5911852AJun 15, 1999
Plasma processing apparatus
SUMITOMO METAL IND94 citations94
US5545258AAug 13, 1996
Microwave plasma processing system
SUMITOMO METAL IND49 citations91
US5529632AJun 25, 1996
Microwave plasma processing system
SUMITOMO METAL IND26 citations91
US5804923ASep 8, 1998
Plasma processing apparatus having a protected microwave transmission window
SUMITOMO METAL IND17 citations80
RICOH KK
4 patentsUS6060427AMay 9, 2000
Thermosensitive recording material
RICOH KK24 citations92
US5721190AFeb 24, 1998
Thermosensitive recording medium
RICOH KK22 citations92
US6846538B2Jan 25, 2005
Composite sheet, method of preparing same, and adhesive label sheet assembly having same
RICOH KK12 citations84
US6670010B2Dec 30, 2003
Composite sheet, method of preparing same, and thermosensitive recording adhesive label sheet having same
RICOH KK18 citations84