Inventor
PIAO FAN
US3 patents
Patents
3 patentsUS6458686B1Oct 1, 2002
Inverse integrated circuit fabrication process
ADVANCED MICRO DEVICES INC19 citations87
US6627355B2Sep 30, 2003
Method of and system for improving stability of photomasks
ADVANCED MICRO DEVICES INC13 citations82
US6555234B1Apr 29, 2003
Barrier for and a method of reducing outgassing from a photoresist material
ADVANCED MICRO DEVICES INC14 citations79