Inventor
CHEN CHIE-CHI
TW3 patents
Patents
3 patentsUS6360756B1Mar 26, 2002
Wafer rinse tank for metal etching and method for using
TAIWAN SEMICONDUCTOR MFG20 citations89
US6281140B1Aug 28, 2001
Method of reducing the roughness of a gate insulator layer after exposure of the gate insulator layer to a threshold voltage implantation procedure
TAIWAN SEMICONDUCTOR MFG18 citations82
US6911097B1Jun 28, 2005
Photoresist stripper using nitrogen bubbler
TAIWAN SEMICONDUCTOR MFG15 citations79