Inventor
SPERL IRENE
DE3 patents
Patents
3 patentsUS7081384B2Jul 25, 2006
Method of forming a silicon dioxide layer
INFINEON TECHNOLOGIES AG82 citations96
US6544856B2Apr 8, 2003
Method for increasing the trench capacitance
INFINEON TECHNOLOGIES AG14 citations81
US6716678B2Apr 6, 2004
Method for producing an antifuse and antifuse for the selective electrical connection of adjacent conductive regions
INFINEON TECHNOLOGIES AG4 citations60