Inventor

JUNG KI-HONG

KR3 patents

Patents

3 patents

US9421662B2Aug 23, 2016

Polishing apparatus

SAMSUNG ELECTRONICS CO LTD3 citations69

US9669516B2Jun 6, 2017

Apparatus and method for surface treatment of objects

SAMSUNG ELECTRONICS CO LTD3 citations68

US7196011B2Mar 27, 2007

Apparatus and method for treating substrates

SAMSUNG ELECTRONICS CO LTD6 citations53